SPIN COATER 12" COMPACT WITH VACUUM CHUCKS, SPC-120 본문
Input power supply AC220V, 50Hz
Chamber material PP/Stainless steel (transparent acrylic upper cover)
Substrate size Diameter≤12 inches (~300mm)
Spin speed 0-5000rpm
Acceleration 100-5000rpm/s
Speed resolution 1rpm
Single step time 3000s
Operation method 7 inches HD LCD touch screen
Dispensing method Manual dispensing
Coating curve Each curve has 5 segments, can store 5 curves in total
Vacuum chuck Yes, include
Vacuum pump Oil-less pump
Pumping speed 50 L/min
Total weight ~40kg
Includes: vacumm pump
Spin coater 12"- compact with vacuum chucks, SPC-120
더 자세한 정보는 켐코코리아로 문의하세요~!
켐코코리아 주식회사
Tel. 043-215-2012
e-mail. ck@chemcokorea.com
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